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Applied Physics Reviews — 1982


The early history of the scanning electron microscope

C. W. Oatley

J. Appl. Phys. 53, R1 (1982); http://dx.doi.org/10.1063/1.331666 (13 pages)

Online Publication Date: 12 December 2006

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The article begins with an account of prewar German work, particularly that of von Ardenne, who established the theoretical basis of a scanning electron microscope and constructed an instrument which was primarily intended to overcome chromatic aberration when relatively thick specimens were examined by transmission. Neither this microscope nor a different one built a few years later in the U. S. A. attained sufficient resolution to gain acceptance and the reasons for this are examined. The remainder of the article deals with work carried out in the Cambridge University Engineering Department over the years from 1948 to about 1965, when the first successful commercial instrument was produced. The contributions made by successive research students are explained, as are also the nonscientific factors which influenced the course of the development.
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07.78.+s Electron, positron, and ion microscopes; electron diffractometers

Electron backscattering from thin films

H. Niedrig

J. Appl. Phys. 53, R15 (1982); http://dx.doi.org/10.1063/1.331005 (35 pages)

Online Publication Date: 12 December 2006

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The basic principles of electron backscattering from atoms and solids in the energy range 10 to 100 keV are reviewed. The total backscattering from thin self‐supporting films, from bulk solids, and from thin surface films on supporting bulk solids is discussed as well as the angular distribution of the backscattered electron intensity for normal and for oblique incidence of the primary beam. The results of theoretical models are compared with experimental results. Contrast mechanisms in scanning electron microscopy based on electron backscattering and the influence of diffraction effects are described. Finally the thickness determination of thin films by electron backscattering and by other methods is reviewed.
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61.05.J- Electron diffraction and scattering

Charge collection scanning electron microscopy

H. J. Leamy

J. Appl. Phys. 53, R51 (1982); http://dx.doi.org/10.1063/1.331667 (30 pages)

Online Publication Date: 12 December 2006

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This review encompasses the application of the scanning electron microscope to the study and characterization of semiconductor materials and devices by the Electron Beam Induced Conductivity (EBIC) method. In this technique, the charge carriers generated by the electron beam of the microscope are collected by an electric field within the material and sensed as a current in an external circuit. When employed as the video signal of the SEM, this collected current image reveals inhomogeneities in the electrical properties of the material. The technique has been used to determine carrier lifetime, diffusion length, defect energy levels, and surface recombination velocities. Charge collection images reveal the location of pn junctions, recombination sites such as dislocations and precipitates, and the presence of doping level inhomogeneities. Both the theoretical foundation and the practical aspects of these effects are discussed in a tutorial fashion in this review.
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07.78.+s Electron, positron, and ion microscopes; electron diffractometers
07.79.Cz Scanning tunneling microscopes
61.05.-a Techniques for structure determination
72.20.-i Conductivity phenomena in semiconductors and insulators
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Erratum: Electron backscattering from thin films [J. Appl. Phys. 53, R15 (1982)]

H. Niedrig

J. Appl. Phys. 53, 5361 (1982); http://dx.doi.org/10.1063/1.331657 (1 page)

Online Publication Date: 12 December 2006

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Abstract Unavailable
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61.05.J- Electron diffraction and scattering
99.10.Cd Errata

Electron channeling patterns in the scanning electron microscope

David C. Joy, Dale E. Newbury, and David L. Davidson

J. Appl. Phys. 53, R81 (1982); http://dx.doi.org/10.1063/1.331668 (42 pages)

Online Publication Date: 12 December 2006

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This article provides a comprehensive review of the theory, practice, and application of electron channeling patterns in the scanning electron microscope. An atlas of indexed channeling maps for the bcc, fcc, diamond cubic, and hcp systems is included with a bibliography of 240 references containing all known published work on electron channeling for crystallographic studies in the SEM.
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07.78.+s Electron, positron, and ion microscopes; electron diffractometers
07.79.Cz Scanning tunneling microscopes
61.05.-a Techniques for structure determination

Semiconducting and other major properties of gallium arsenide

J. S. Blakemore

J. Appl. Phys. 53, R123 (1982); http://dx.doi.org/10.1063/1.331665 (59 pages)

Online Publication Date: 12 December 2006

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This review provides numerical and graphical information about many (but by no means all) of the physical and electronic properties of GaAs that are useful to those engaged in experimental research and development on this material. The emphasis is on properties of GaAs itself, and the host of effects associated with the presence of specific impurities and defects is excluded from coverage. The geometry of the sphalerite lattice and of the first Brillouin zone of reciprocal space are used to pave the way for material concerning elastic moduli, speeds of sound, and phonon dispersion curves. A section on thermal properties includes material on the phase diagram and liquidus curve, thermal expansion coefficient as a function of temperature, specific heat and equivalent Debye temperature behavior, and thermal conduction. The discussion of optical properties focusses on dispersion of the dielectric constant from low frequencies [κ0(300)=12.85] through the reststrahlen range to the intrinsic edge, and on the associated absorption and reflectance behavior. Experimental information concerning the valence and conduction band systems, and on the direct and indirect intrinsic gaps, is used to develop workable approximations for the statitistical weights Nv(T) and Nc(T), and for the intrinsic density. Experimental data concerning mobilities of holes and electrons are briefly reviewed, as is also the vn(E) characteristic for the conduction band system.
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72.80.Ey III-V and II-VI semiconductors
78.20.-e Optical properties of bulk materials and thin films
62.20.D- Elasticity
63.20.-e Phonons in crystal lattices
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Erratum: Electron backscattering from thin films [J. Appl. Phys. 53, R15 (1982)]

H. Niedrig

J. Appl. Phys. 53, 7618 (1982); http://dx.doi.org/10.1063/1.331653 (1 page)

Online Publication Date: 12 December 2006

Full Text: | Download PDF

Abstract Unavailable
Show PACS
61.05.J- Electron diffraction and scattering
99.10.Cd Errata
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